Production of high-purity silicon and polysilicon used in the fabrication of semiconductors has been evolving to meet the increasing quality needs of device manufacturers. Purity of the silicon wafer substrate has an impact on the ability of integrated device manufacturers to maintain and/or increase yields. With geometries getting smaller, contamination in the silicon wafer are getting stricter. Metals (including boron), silica, TOC and particles are the most common contaminants that need to be reduced.
There are many applications within the silicon and polysilicon production and manufacturing process where Evoqua provides solutions to meet your production, discharge and sustainability goals. Please visit the application pages below to learn more and to find products and services for your specific application.
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